The microfabrication laboratory is a 1,500 ft2, Class 1000 clean room with a complete set of fabrication equipment for processing 100mm (4 inch) size silicon wafers. Our lab contains equipment for deposition, diffusion, patterning (lithography), and etching thin films. The lab also contains metrology equipment for measuring surface features, film thicknesses, and probing the electrical and optical performance of devices. We have immediate access to surface analysis techniques such as SEM-EDS, AFM, XRD, XRF and Confocal microscopy.
The cleanroom is located in Building 41-203 and courses are offered in Microfabrication (MATE 430/435), Micro System Design (MATE 550) and Microfluidics (MATE/ME 555).